MK5

Active Compensation
for Electromagnetic Strayfields

EMI fields and Imaging Instruments

Electromagnetic strayfileds disturb imaging
instruments in laboratory surroundings

The MK5 System

Our most powerful and user friendly EMI
compensation solution for day-by-day use

The MK5 System

Our most powerful and user friendly EMI
compensation solution for day-by-day use

State of the art electronics
6x faster DSP for more complex control algorithms
6 sensor channels and 6 compensation channels

The Controller

With updated electronics inside of a new 3HE housing the controller of the
MK5 has more than six times of the calculation performance of the MK4.

The Controller

With updated electronics inside of a new 3HE housing the controller of the
MK5 has more than six times of the calculation performance of the MK4.

  • 32-bit 300MHz floating point DSP with up to 1.8GFLOPS
  • Internal/external, coarse & fine offset compensation (MK3, MK4, MK5 and Bartington sensor support)
  • Dual sensor support
  • 2x 3 axis control
  • Photo coupled digital I/O
  • 6 channel output
  • USB and RS232 communication interface
  • Graphical user interface (Touch screen & Win GUI)

Relative dimensions of MK4's sensor

Relative dimensions of competitors sensor

6x higher allowable DC field range
Small outline — 1/6 sensor volume
Most flexible positioning
Wide bandwidth
Ten times lower sensor noise level

The Sensor

Small outline for maximum flexibility in positioning

The Sensor

With updated electronics inside of a new 3HE housing the controller of the
MK5 has more than six times of the calculation performance of the MK4.

  • Patented Design (European Patent 2259081)
  • Small outline & weight (120x32x32mm)
  • Wide bandwidth (DC – 100kHz)
  • Noise below 1nT/sqrt(Hz)(0.5nT typ.)
  • Tolerates external fields up to 400uT

The Helmholtz Cage

Optimal field homogenity result in ideal compensation
results in a large volume over a wide frequency range

The Helmholtz Cage

Standard 3 axis cable set for optimal compensation performance. Simple customization with interconnection boards possible. Robust and cleanroom compatible coil support structure with flexibility for invididual configuration available.

The Helmholtz Cage

Standard 3 axis cable set for optimal compensation performance. Simple customization with interconnection boards possible. Robust and cleanroom compatible coil support structure with flexibility for invididual configuration available.

  • Self supported coil support structure based on aluminium extrusion profile 60 mm square
  • Clean room compatible surfaces
  • Flexible size from 1 to 3 m edge length in standard configuration larger sizes available on request
  • Snap-in connection possible for single legs or complete structure for easy access for instrument maintenance situation
sensor position above
sensor position top right
sensor position middle right
sensor position bottom right

Positioning the Sensor

Due to its small outline and the high DC field range the improved MK5 sensor allows for more flexible positioning. Hence, better disturbance field reduction is made possible.

sensor position bottom right

Active EMI compensation

Optimal combination of the elements of the MK5 system provide
visibly better results for e-beam imaging.

Semiconductor Manufacturing
Life Science
Medical Equipment
Industry

MK5

Active Compensation
for Electromagnetic Strayfields

Resulting Images

EMI disturbance without/with IDE compensation.

Field Reduction Rate

Optimal field compensation results for the instrument even with restrictions
for sensor positioning. Comparison of the feld reduction rates with conventional control (left) and IDE MK5 (right).

A User Friendly Interface for Day-By-Day Use

Three user interfaces allow a variable and
purpose driven operation of the MK5

Push Buttons and LEDs

Communiation via push buttons and LEDs for simple and fast
interaction for the everyday use by the tool operator

4.3″ color touch display
Support for easy first level diagnostics
Performance indicator for each single axis
Fine adjustment of control loop parameters

Touch Display

Communication via 4.3 inch touch display for the advanced user

RS-232 or USB connection
For installation, diagnostics and trouble shooting
Standard and advanced control algorithms can be configured
Logging and tracing functionality

Graphical User Interface on the PC

Communication via PC and Graphical User Interface for the service
personnel for instalation and trouble shooting purposes

6 input and 6 output channels
6 output channels provide larger fields
Two different sensor types at one controller
Side-by-side cages or 6-axis compensation
Large cage sizes and high field strength comp

Advanced Application Possibilities

Six input and output channels, a higher output power and
the possibility to attach two sensors to the controller offer
highest flexibility to your setups.

More than 6x of MK4 calculation performance
Compact sensor design allows more flexible positioning
6x higher allowable DC field range of sensor
10x lower sensor noise level
User friendly interface with purpose driven communication
Choice of broad or narrow band setup or combination of both
6 input and output channels for multi channel applications
2 sensor setup for complex applications

The MK5 EMI System

New generation EMI cancellation

12 / 2015